Magnesium Zirconate Titanate Thin Films Used as an NO2 Sensing Layer for Gas Sensor Applications Developed Using a Sol–Gel Method
نویسندگان
چکیده
Magnesium zirconate titanate (MZT) thin films, used as a sensing layer on Al interdigitated electrodes prepared using sol–gel spin-coating method, are demonstrated in this study. The p-type MZT/Al/SiO2/Si structure for NO2 is also discussed. results indicated that the best sensitivity of gas sensor occurred when it was operating at temperature ranging from 100 to 150 °C. detection limit low 250 ppb. MZT film 8.64% and 34.22% 0.25 ppm 5 molecules working °C, respectively. exhibited high repeatability selectivity NO2. response values 250, 500, 1000, 1500, 2000, 2500, 5000 ppb °C were 8.64, 9.52, 12, 16.63, 20.3, 23, 34.22%, Additionally, we observed linearity molecules. These indicate MZT-based materials have potential applications use sensors.
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ژورنال
عنوان ژورنال: Sensors
سال: 2021
ISSN: ['1424-8220']
DOI: https://doi.org/10.3390/s21082825